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PDF) Recent Progresses and Perspectives of UV Laser Annealing Technologies for Advanced CMOS Devices
Investigation of oxygen penetration during UV nanosecond laser annealing of silicon at high energy densities
Solid Phase Recrystallization and Dopant Activation in Arsenic Ion-Implanted Silicon-On-Insulator by UV Laser Annealing
Nanoscale measurements of phosphorous-induced lattice expansion in nanosecond laser annealed germanium
Supplementary Material to: Phononic transport and simulations of annealing processes in nanometric complex structures
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